Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
62 (1993), S. 1182-1184
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We report a method for accurate growth of vertical-cavity surface-emitting lasers (VCSELs). The method uses a single reflectivity spectrum measurement to determine the structure of the partially completed VCSEL at a critical point of growth. This information, along with the extracted growth rates, allows imprecisions in growth parameters to be compensated for during growth of the remaining structure, which can then be completed with very accurate critical dimensions. Using this method, we can now routinely grow lasing VCSELs with Fabry–Perot cavity resonance wavelengths controlled to within 0.5%.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.108727
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