ISSN:
1432-0630
Keywords:
PACS: 61.80.Ba; 61.82.Ms; 68.35Bs
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. Al2O3 seal ring faces were treated by KrF excimer laser irradiation. Surface characteristics induced by laser irradiation depend upon laser fluence, the number of laser pulses, the frequency and duration of the laser pulses, the rotation rate of the ring, and the processing atmosphere. Microstructural analyses of the surface and cross section of the laser-processed seal faces showed that, at low fluence (1.8 J/cm2), the surface is covered by scale due to the melting/resolidification processes. At high fluence (7.5 J/cm2), there is no continuous scaling on the surfaces. Material is removed by decomposition/vaporisation and the ablation depth is linearly dependent on the number of pulses; on the surface, a network of microcracks forms. The evolution of surface morphology and roughness is discussed with reference to composition, the microstructure and physical and optical properties of Al2O3, and laser processing parameters.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390051466
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