ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An inchworm system with a new type of clamping mechanism has been made for a coarse positioner in a scanning tunneling microscope. The clamping mechanism operates by means of springs and piezoelectric actuators. This system can move a probe tip transversely and longitudinally in the horizontal plane, and the sample vertically, in steps, with a range of 8 mm in each direction.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1141021
Permalink