ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Thin films of titanium oxide (TiO2) were synthesized from Titanium diisopropoxidebis(dipivaloylmethanate) [Ti(O-i-Pr)2(dpm)2] as a source material using supercritical carbon dioxide(CO2) fluid. Flat films with a uniform microstructure were fabricated on SiO2/(100)Si substrates at afluid pressure of 8.0 MPa, while granular particles were deposited on the film surface at a fluidpressure of 10.0 MPa. TiO2 films fabricated in supercritical CO2 atmosphere at 10.0 MPa werecrystalline at the reaction temperature of 100ºC, which was significantly lower than those in theconventional film-deposition techniques
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/51/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.320.91.pdf
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