ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The evaluation of elastic property for thin diamond-like carbon (DLC) films has been presented with buckle analysis of compressive stressed film on patterned substrate. When substrate has been patterned with adhesion release layer, the morphologies of buckle configuration on patterned layer has been controlled from straight sided (Euler) buckle to nonlinear telephone cord type bucklewith respect to the pattern width. By using the simple equation for Euler buckle, the elastic modulus has been easily calculated, shown well consistent with the results by nano-indentation test
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/10/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.475-479.3935.pdf
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