ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Aluminum nitride (AlN) is a promising Acoustic Emission (AE) sensor element forhigh-temperature environments such as gas turbines and other plants because AlN maintains itspiezoelectricity up to 1200°C. Highly c-axis-oriented AlN thin-film sensor elements were preparedon silicon single crystals by rf magnetron sputtering. Both ordinary-temperature AE sensors andhigh-temperature AE sensors have been developed using these elements. In this paper, to study effectsof d33 and thickness of AlN elements on sensor sensitivity, AlN elements with d33 from 2 to 7 pm/Vand thickness from 3 to 9 /m were prepared. It is confirmed that the AE sensor sensitivity increasedwith d33 and thickness of AlN elements. The sensitivity of the high-temperature AE sensor was alsoimproved by a design of the sensor structure. The sensor characteristics were evaluated at elevatedtemperatures from 200 to 600˚C. It was confirmed that the AE sensor works well at 600˚C and doesnot deteriorate
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/39/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.13-14.111.pdf
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