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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1653-1656 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: For many applications of ion sources the quality of the generated ion beam plays an increasingly important role. Ion sources consist of the plasma generator and the extraction system. Both parts can, due to high ion temperature or various aberrations, contribute to a degrading of the beam quality. Though the beam quality is determined by many more factors, the transverse motion of the particles certainly is one of the important parameters. Knowledge of it can be obtained by an emittance measurement. This is best done in a four-dimensional phase space, yielding a density distribution as function of the transverse spatial and momentum coordinates. Often, however, due to practical considerations, only two dimensions of the four-dimensional "trace space'' are being measured. This two-dimensional data can be obtained as a section or as a projection of the four-dimensional trace space, where both methods have their merits. Projectional emittance measurements can usually be performed much easier and quicker, but by the projection of the four-dimensional space onto a two-dimensional plane information is lost. And although not all the particles of the beam are represented in a section of trace space, here aberrative distortions of the emittance can be seen most clearly and allow an easier comparison to numerically obtained data. The advantages and disadvantages of both methods are discussed. Numerical and experimental examples are presented. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2604-2606 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: We present beam measurements which have been carried out using a CHORDIS ion source supplied with a modified extraction system. This system is designed to handle extraction voltages up to 60 kV. For beam diagnostics, a Faraday cup and a sector magnet have been used. Presented are measurements on beam current, mass, and energy spectra in dependence on various source parameters as gas pressure, arc voltage, and extraction voltage.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 3036-3041 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: For the analytical and numerical description of the emittance of a particle beam in cylindrical symmetric transport and accelerator systems often the rr′ plane is used, yielding a sectional emittance ε (r, r′). In contrast, emittance measurements are mostly taken as the projectional emittance ε (x, x′). As could be shown earlier, the description of a cylindrical symmetric beam in the projectional xx′ plane of phase space results in the presence of lines for each ring of particles, connecting the two corresponding points, with which the same beam is described in the rr′ plane. There is a very special intensity distribution along these lines, both for straight as well as for skew trajectories. It is shown here that the theoretically obtained density distribution along such a line is a weight function for the intensity measured with a slit of width Δx. For one particle it can also be interpreted as a probability function for the particle being at a certain position x0. In view of Liouville's theorem, the case of the two-dimensional emittance in cylindrical symmetric systems is discussed, where this law of conservation is, due to the coupling of the x and y planes, not generally applicable. It is shown here that for an emittance measurement performed in the xx′ plane, care has to be taken when choosing the slit width, since a small Δx yields a good spatial resolution, but increases the risk of missing information in the center of each connecting line. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 2698-2706 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Among the various possibilities for investigating the properties of ion beams, two of the most important principles for determining the beam quality are profile measurements using wires or slit apertures, and different kinds of emittance measurement devices. However, most of the commonly used systems have the disadvantage of being either destructive to the beam, or at least to have a considerable influence on the further beam propagation downstream of the point of measurement. Also, for the investigation of intense ion beams, thermal problems on the scanners themselves might arise. Observation of particles emitted from the ion beam in radial direction allow an indirect but nondestructive observation of the beam. Of the different optical methods that exist to accomplish this, we recently conducted an investigation on the possibilities to employ a charge coupled device-camera system for such nondestructive beam diagnostics in our space-charge compensation test stand. First, experimental results on optical profile measurements are presented and compared to results obtained by a slit scanner and a wire scanner. Additionally, to gain a better understanding of the measured data, optically obtained sectional profiles behind a slit and a circular aperture were analyzed. Possibilities for gaining information on the two-dimensional beam profile and the beam emittance are explored. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1249-1251 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Multicusp ion sources are used for various applications. Presently, the implementation of this type of ion source is planned for the development of an ion beam lithography machine, which will be used for the projection of sub-0.2 μm patterns onto a wafer substrate. Since, for this application, a very good beam quality and a small ion energy spread are required, emittance measurements have been performed on a multicusp ion source for various source conditions. It is shown that the installation of proper capacitors between the extraction electrodes is necessary to avoid rf pickup, which otherwise leads to a distortion of the beam emittance. The influence of the magnetic filter field on the beam emittance has been investigated, and the beam emittance of a dc filament-discharge plasma has also been compared to that of a rf-generated plasma. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1271-1271 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: For many applications of ion sources the quality of the generated ion beam plays an increasingly important role. Ion sources consist of the plasma generator and the extraction system. Both parts can, due to high ion temperature or various aberrations, contribute to a degrading of the beam quality. Though the beam quality is determined by many more factors, the transverse motion of the particles certainly is one of the important parameters. Knowledge of it can be obtained by an emittance measurement. This is best done in a four-dimensional phase space, yielding a density distribution as function of the transverse spatial and momentum coordinates. Often, however, due to practical considerations, only two dimensions of the four-dimensional "trace space'' are being measured. This two-dimensional data can be obtained as a section or as a projection of the four-dimensional trace space, where both methods have their merits. Projectional emittance measurements can usually be performed much easier and quicker, but by the projection of the four-dimensional space onto a two-dimensional plane information is lost. And although not all the particles of the beam are represented in a section of trace space, here aberrative distortions of the emittance can be seen most clearly and allow an easier comparison to numerically obtained data. The advantages and disadvantages of both methods are discussed. Numerical and experimental examples are presented. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 493-495 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The energy distributions of ions and electrons extracted from a duoplasmatron ion source have been measured by a 127° cylinder spectrometer, providing information on the axial potential distribution in the source. The energy resolution of the spectrometer was about ±1 eV. Compared to measurements with Langmuir probes, this method has the advantage that the plasma potential is not disturbed. The energy spectrum of the extracted ions shows up to three peaks, which are related to different places of ionization in the source. The total energy spread is up to 100 eV. This energy spread can be influenced (down to 6 eV) by the potential of the expansion cup. Surprisingly, 90% of the extracted electrons are not created at the cathode but in the plasma of the intermediate electrode. This knowedge allows a better optimization of the source by independent regulation of gas pressure, intermediate electrode potential, and cathode potential. For optimum ionization of the working gas the potential of the intermediate electrode can be regulated so that the electron energy reaches the optimum value for the ionization in front of the anode and the energy and the intensity of the electron current is regulated by means of the potential of the expansion cup. These parameters strongly influence the beam quality.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    Amsterdam : Elsevier
    Nuclear Inst. and Methods in Physics Research, B 89 (1994), S. 17-22 
    ISSN: 0168-583X
    Source: Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
    Topics: Physics
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    Amsterdam : Elsevier
    Nuclear Inst. and Methods in Physics Research, B 89 (1994), S. 49-53 
    ISSN: 0168-583X
    Source: Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
    Topics: Physics
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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