ISSN:
1432-0630
Keywords:
79.20.Nc
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The spatial distributions of sputtered particles have been investigated both experimentally and by computer simulation using the TRIM.SP code for 30 keV argon-ion bombardment of tungsten in a wide range of primary-ion incidence angles (0°–80°). Two sets of the targets were used. One of them was prepared from fine-grained polycrystalline ingot, another one from rolled sheet W. It was found that the experimental results for these targets were different. For rolled tungsten a typical Wehner-spot picture, although smeared, is observed. For fine-grained tungsten the sputtered particle spatial distributions are practically cupola-shaped. Some differences between the experimental results and computer-simulation data can be attributed to the effect of surface topography either initial or developed during the ion bombardment.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00332602
Permalink