Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 121-123 (Mar. 2007), p. 1363-1366
ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Linear encoders for nanoscale position sensing based on vertical arrays of singlemulti-walled carbon nanotubes (MWNTs) are investigated from experimental, theoretical, and designperspectives. Vertically aligned single MWNTs are realized using a combination of e-beamlithography and plasma-enhanced chemical vapor deposition (PECVD) growth. Field emissionproperties of the array are investigated inside a scanning electron microscope (SEM) equipped with a3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateralposition of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.1363.pdf
Permalink
Library |
Location |
Call Number |
Volume/Issue/Year |
Availability |