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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 3752-3756 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: In this article, a new curve of the correction factor for the measurement of sheet resistance of a square sample with a square four-point probe is presented by using the theory of conformal transformation. This curve is quite different from that obtained by using the theory of infinite dipoles. An experimental curve is recommended to use. The function of the conformal transformation used in this article is simple and can be easily used for solving the problem of boundary effect of current field. The theoretical curve is suitable to the boundary areas of wafers.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 3757-3762 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: By using conformal transformation to take account of the boundary effect, it has been confirmed that there are some areas of a square sample near the corners besides the boundary suitable to the resistance measurement of Van der Pauw's method. The theoretical criterion of the suitability is whether Van der Pauw's formula for calculation of the sheet resistance is still valid provided the voltage values in the formula for two times the measurement are substituted with those obtained by using the theory of conformal transformation. The experimental criterion is whether the experimental values of sheet resistance for probes in some areas are equal to that for them at the boundary for the same sample. The experimentally confirmed areas are larger than what the theory predicts. Our repeated experiments show that the areas out of the circle tangent to the boundary are suitable to Van der Pauw's method.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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