ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
An electrostatic motor is a very complex dynamical system whose performance criticallydepends on the shape of the rotor and stator, number of poles, clearances between axis and rotor,friction, rotor vibrations, and levitation, etc. There are many possible micromotor constructionsdepending on the required accuracy, the speed of rotation and power of the motor. This work showsthe technology required to build a micromotor using UV lithography. Studies of vibrationcharacteristics using ANSYS and MATLAB modeling software and an experimental analysis tooptimize the dynamical properties of the system and to improve its manufacturing process are alsoshown
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/22/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.113.185.pdf
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