ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
With the development of science and technology, Atomic Force Microscope is widelyapplied to the field of machining process in nanometer scale. Due to the limitation of the inventivepurpose of AFM, only height mode and deflection mode can be applied in AFM-tip micromachining.It can’t control the machining depth during the micromachining process at present. In this paper, anew micromachining system is set up, which composed of a high precision three-dimensional stage,an AFM, a diamond probe and a special control device. By utilizing variation parameters PIDalgorithm and controlling the machining depth directly, the micromachining system can resolve theproblem mentioned above
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/51/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.315-316.800.pdf
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