ISSN:
1662-7482
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
For the measurement of ultra smooth surface topography, a surface image scanningdevice measurement head mechanism based on the principle of atomic force microscope (AFM)was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stageadjustment mechanism, and tests the atomic force between the sample and the probe by using lasergenerator, position sensitive detector (PSD), cantilever and probe. This mechanism has high settingaccuracy and resetting accuracy, combined with two-dimension movable table, can scan the surfacetopography of samples
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/38/transtech_doi~10.4028%252Fwww.scientific.net%252FAMM.10-12.828.pdf
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