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Two-Dimensional Adaptive Simulation of Dopant Diffusion in Silicon /; ZIB-Report 00-03 (2000)

Lang, Jens ; Merz, Wilhelm

Berlin :Konrad-Zuse-Zentrum für Informationstechnik,

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Title: Two-Dimensional Adaptive Simulation of Dopant Diffusion in Silicon /; ZIB-Report 00-03

Author: Lang, Jens

Contributer: Merz, Wilhelm

Publisher: Berlin :Konrad-Zuse-Zentrum für Informationstechnik,

Year of publication: 2000

Pages: 16 S.

Series Statement: ZIB-Report ZIB-Report 00-03

ISSN: 1438-0064

Type of Medium: Book

Language: English

URL: http://opus.kobv.de/zib/volltexte/2000/572/

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Numerical Simulation of Single Species Dopant Diffusion in Silicon under Extrinsic Conditions /; Preprint SC 97-47 (1997)

Lang, Jens ; Merz, Wilhelm

Berlin :Konrad-Zuse-Zentrum für Informationstechnik,

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Title: Numerical Simulation of Single Species Dopant Diffusion in Silicon under Extrinsic Conditions /; Preprint SC 97-47

Author: Lang, Jens

Contributer: Merz, Wilhelm

Publisher: Berlin :Konrad-Zuse-Zentrum für Informationstechnik,

Year of publication: 1997

Pages: 28 S.

Series Statement: Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin Preprint SC 97-47

ISSN: 0933-7911

Type of Medium: Book

Language: English

URL: http://opus.kobv.de/zib/volltexte/1997/317/

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