ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A vertical hot-wall type reactor, with a unique structure designed for controlling both gasflow behavior and thermal gradient ([removed info]T/mm) on the susceptor surface, was developed. The simulationresults indicate that depending on the height of the epitaxy room (h), the [removed info]T/mm can be changed froma negative to a positive value. Preliminary epitaxial growth experiments resulted in a maximumgrowth rate of 51 μm/h, 4-inch area uniformity of σ/mean=1.7% for growth rate and σ/mean=21.5 %for doping concentration, and Z1/2 trap concentration of 9×1012 cm-3 at a growth rate of 43 μm/h
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/17/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.556-557.81.pdf
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