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  • 2000-2004  (4)
  • 1935-1939  (2)
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  • 1
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Journal of the American Chemical Society 61 (1939), S. 577-581 
    ISSN: 1520-5126
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 8 (2001), S. 3008-3017 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The penetration of radio-frequency energy into cylindrical devices is relevant to the production of uniform plasmas for etching and deposition processes in the production of semiconductor circuits. The so-called "anomalous skin effect" has been invoked to explain irregularities not predicted by classical electromagnetic theory. These expectations are summarized for the collisionality regimes of interest, and new results are given for nonkinetic effects caused by small direct current magnetic fields and the ponderomotive force. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 9 (2002), S. 1449-1455 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A simple method for analyzing cylindrical Langmuir probe curves in a cold-ion plasma is described which yields the ion density in weakly collisional plasmas for which purely collisionless theories give erroneous results. The method is based on an extrapolation to the floating potential of the saturation ion current raised to the 4/3 power. This procedure is not supported by theory but apparently works because effects neglected in the theory tend to cancel. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 8 (2001), S. 3029-3041 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High-density, radio-frequency plasmas used in semiconductor processing have progressed to densities n≥5×1011 cm−3, where the methods used to interpret Langmuir probe characteristics in low-density (109–11 cm−3) plasma reactors are no longer valid. Though theory and computations for arbitrarily dense collisionless plasmas exist, they are difficult to apply in real time. A new parametrization and iteration scheme is given which permits rapid analysis of Langmuir probe data using these theories. However, at high n, measured ion saturation curves are shown which do not agree in shape with the "correct" theory, yielding anomalously high values of n. The discrepancy with independent measures of n, which can exceed a factor of 2, is believed to be caused by charge-exchange collisions well outside the sheath. Probe designs for avoiding this discrepancy are suggested. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 8 (2001), S. 5051-5052 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The floating potential of a cylindrical probe is computed numerically, and the results are fitted to analytic functions. They differ significantly from the plane approximation. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Industrial & engineering chemistry 30 (1938), S. 146-153 
    ISSN: 1520-5045
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Type of Medium: Electronic Resource
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