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  • 1995-1999  (4)
  • 1
    Electronic Resource
    Electronic Resource
    A re-interpretation of the existence of a spectrum of activation energies for the microstructural changes in Al 1% Si lines (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 2160-2161 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: During the first thermal treatment after deposition and/or passivation of Al-based interconnects, a marked decrease in the electrical resistance can be observed. This resistance decrease cannot be described in terms of a single rate constant. Precipitation of the alloyed elements is probably the responsible atomic process. In a previous article, a spectrum of activation energies was extracted in order to characterize this decay. Recent research has shown that the presence of an activation energy spectrum is, mathematically, completely equivalent with a spectrum of pre-exponential factors. Since for precipitation–dissolution, the pre-exponential factor is a function of the distribution and geometry of the precipitates, the use of a spectrum of pre-exponential factors is for this specific case probably physically more relevant. The technique introduced for the determination of the spectrum of activation energies is still valid in case of the presence of a spectrum of pre-exponential factors. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.362338
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    A diffusion model of metal surface modification during plasma nitriding (1996)
    Springer
    Applied physics 63 (1996), S. 475-480 
    Details
    ISSN: 1432-0630
    Keywords: PACS: 68.65 (or 66)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: g (t)=g 0 f  -1 (t/t 0), where g(t) is the sub-layer thickness at time t, g 0 and t 0 are parameters which depend on the treated material and plasma characteristics,  f -1 is the inverse of the function −ln(1−x)+x), 0≤x≤1. Under negligible erosion effects, the expression for g(t) reduces to the parabolic law. The diffusion zone (substratum) growth does not follow the parabolic law as well. However, the deviation occurs after long plasma nitriding time. The model can be used for experimentally determining the effective diffusion coefficients and the erosion rate during plasma nitriding of metal surfaces.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01571677
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    A diffusion model of metal surface modification during plasma nitriding (1996)
    Springer
    Applied physics 63 (1996), S. 475-480 
    Details
    ISSN: 1432-0630
    Keywords: 68.65 (or 66)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A diffusion model of metal surface modification by plasma nitriding has been developed. This model takes into account the erosion effects at the plasma/solid interface occurring due to the ion bombardment of the surface. For constant sputtering rate, which is the usual situation during plasma nitriding, the growth of the sub-layers is well described by the analytical expressiong(t) =g 0,f −1 (t/t 0), whereg(t) is the sub-layer thickness at timet,g 0 andt 0 are parameters which depend on the treated material and plasma characteristics,f −1 is the inverse of the function — In(1 - x) + x), 0 ≤x ≤ 1. Under negligible erosion effects, the expression forg(t) reduces to the parabolic law. The diffusion zone (substratum) growth does not follow the parabolic law as well. However, the deviation occurs after long plasma nitriding time. The model can be used for experimentally determining the effective diffusion coefficients and the erosion rate during plasma nitriding of metal surfaces.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01571677
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Generalized Wagner’s diffusion model of surface modification of materials by plasma diffusion treatment (1998)
    Springer
    Applied physics 67 (1998), S. 183-192 
    Details
    ISSN: 1432-0630
    Keywords: PACS: 68.65; 68.66
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: 0 f-1(t/t0), where g(t) is the sub-layer thickness at time t, g0 and t0 are parameters that depend on the treated material and plasma characteristics, and f-1 is the inverse function of f(x)=-(ln(1-x)+x), where x=g(t)/g0, 0≤x≤1. Under negligible erosion effects, the model becomes of Wagner’s diffusion model type and the expression for g(t) reduces to the parabolic law. The model can be simplified by considering the compound layer as a united one. The general and simplified models can be used as a method for the experimental determining of the effective diffusion coefficients and the erosion rate during plasma treatment of material surfaces.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s003390050757
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    Paper (German National Licenses)
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