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Thin film characterisation using backscattering spectrometry (1997)

Ramana, J. V. ; Raju, V. S. ; Gangadharan, S.

Springer

Journal of radioanalytical and nuclear chemistry 217 (1997), S. 293-295

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ISSN: 1588-2780

Source: Springer Online Journal Archives 1860-2000

Topics: Chemistry and Pharmacology , Energy, Environment Protection, Nuclear Power Engineering

Notes: Abstract The use of proton resonance backscattering spectrometry for the estimation of carbon as thin films formed on a target material is discussed. Conventional He backscattering experiments were also carried out on TiVN films formed on beryllium backing but the determination of stoichiometry of these films were difficult using conventional software for depth resolution.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF02034459

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