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X-ray diffraction analysis of Si1−xGex/Si superlattices (1992)

Mai, Z. H. ; Ouyang, J. T. ; Cui, S. F. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 72 (1992), S. 3474-3479

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: Si1−xGex/Si strained-layer superlattices grown by molecular-beam epitaxy on Si substrates were investigated by x-ray double-crystal diffraction and x-ray grazing incidence diffraction. Both coherent and incoherent interfaces between the two components of the superlattices were observed. By fitting computer-simulated double-crystal x-ray-diffraction rocking curves to the experimental data, it is determined that there exist graded variations in both the component thickness ratio t1/t2 (t1 and t2 are the thickness of the Si1−xGex and the Si layers, respectively) and the fraction x in one sample. The x-ray grazing incidence diffraction experiments reveal a lattice strain relaxation of about 27% in another sample. The lattice relaxation and the influence of variations of x and t1/t2 on the rocking curves are discussed.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.351423

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Effect of graded layer on the X-ray double-crystal diffraction rocking curve (1992)

Ouyang, J. T. ; Mai, Z. H. ; Cui, S. F. ; [et al.]

Springer

Journal of materials science 27 (1992), S. 6765-6769

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ISSN: 1573-4803

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics

Notes: Abstract The composition gradient in an InAlAs epitaxial layer on InP (0 0 1) substrate has been investigated using an X-ray double-crystal diffraction technique and a computer simulation method. Good agreement has been obtained between theoretical and experimental rocking curves when the correct graded layers are assumed in the samples. The results show that the graded layer introduces very sensitive asymmetric changes in layer peak and interference fringes. The intensities of the interference increase more strongly on the higher or lower angle side, while they are reduced on the other side, and the layer peak shifts to the higher or lower angle direction according to the positive or negative gradient. In all cases, however, the angle separations of the interference fringes do not change if the total thickness of the epilayer is unchanged.