ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
Filamentless negative ion beam production was investigated with a compact microwave ion source (2.45 GHz). One of the key points for negative ion production is the magnetic configuration. A magnetic filter field to lower electron temperature was generated in a negative ion production cell, which was shielded magnetically from a discharge cell with a magnetic field to couple microwave to plasma. Production of H− beam was studied with this source. H− was extracted through a grid slit (2×16 mm2) from plasma and accelerated to 20–40 keV. H− beam current was measured with a Faraday cup after magnetic mass separation. Continuous H− beam current of 73 μA (0.23 mA/cm2) was obtained with a magnetron power of 700 W. H− beam current was increased around 1.4 times by adding Xe gas to the H2 gas. Other negative ion species, which have a potential for applications to industrial ion beam processing with little charge-up problem, were also investigated. Carbon and hydrocarbon negative ion beams were produced using boron alkoxide (B(OCH3)3) and methane. C2H2− beams (22 μA) were obtained with the alkoxide. C2−(1.6 μA), C2H−(2.3 μA), C2H2−(0.6 μA), and H−(6.9 μA) beams were produced with methane. SiF4 and BF3 were used to generate F−, Si−, SiF3− and B− beams. Beam currents of these ion species were 17, 0.25, 1.5, and 0.03 μA, respectively. © 2000 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1150404
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