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  • 1985-1989  (2)
  • 1
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 55 (1989), S. 301-303 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Superconducting films of YBa2Cu3O7−δ have been synthesized in a novel ion beam sputter deposition system which features a rotating target holder with BaO2, CuO, and Y2O3 as the sputtering targets. The dwell time of the ion beam on each oxide target is determined by a computer-controlled feedback loop using the signal from a programmable quartz crystal resonator. The sputtered fluxes of all film components originate from the same spatial location, ensuring homogeneous film composition. The results presented demonstrate for the first time an automated ion beam sputter deposition system with the capability of producing high Tc superconducting films by controlled sputtering of either elemental metallic components or oxide precursors. The concept may be extended to include processes such as patterning, production of layered structures (junctions), and film encapsulation necessary for microcircuit manufacturing based on high Tc superconducting films.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 52 (1988), S. 239-241 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Superconducting pressed pellets of YBa2Cu3O7 (Tc=90 K), which were used as ablation targets for laser-induced vapor deposition of high Tc(85 K) superconducting thin films, have been analyzed by secondary electron microscopy, scanning Auger microscopy, energy dispersive x-ray analysis, and x-ray diffractometry. The elemental distribution of Y, Ba, and Cu appears reasonably uniform at depths corresponding to that probed by energy dispersive x-ray analysis (∼1 μm). However, scanning Auger microscopy analysis of the laser-impacted area shows a significant depletion of Cu and spatial redistribution of Y, Ba, Cu, and O on the target surface. X-ray diffractometry of the laser-impacted area shows the appearance of a new broad peak at a diffraction angle 2θ=29.7°, characteristic of BaY2O4 and a poorly defined peak at 2θ=29.3°, that can be attributed to BaCuO2. A possible influence of the laser-induced bulk superconductor compositional changes on the film composition is discussed in relation to recently reported experimental results on laser vapor deposition of high Tc films.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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