ISSN:
1432-0630
Keywords:
79.20
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The statistics of the sputtering process, which has been used to explain sputterbroadening effect due to surface roughness, has been treated with conditional probabilities. This results in the relationship, $${{\Delta z} \mathord{\left/ {\vphantom {{\Delta z} z}} \right. \kern-\nulldelimiterspace} z} \propto \sqrt {(1 + \overline \gamma )/z} $$ , instead of $${{\Delta z} \mathord{\left/ {\vphantom {{\Delta z} z}} \right. \kern-\nulldelimiterspace} z} \propto {1 \mathord{\left/ {\vphantom {1 {\sqrt z }}} \right. \kern-\nulldelimiterspace} {\sqrt z }}$$ derived by S. Hofmann [Appl. Phys.9, 59 (1976)], where δz,z, and $$\overline \gamma $$ are the depth resolution, sputtered depth and sputtering yield, respectively.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00899698
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