ZIB

Treffer pro Seite

Treffer 1 - 1 | 1 Treffer

Sortierung

Digitale Medien

Measurement of energy spread and angular intensity of a cesium liquid metal ion source (1992)

Umemura, K.

Springer

Applied physics 54 (1992), S. 115-119

zur Merkliste hinzufügen auf der Merkliste

Details

ISSN: 1432-0630

Schlagwort(e): 29.25C ; 79.70 ; 41.80

Quelle: Springer Online Journal Archives 1860-2000

Thema: Maschinenbau , Physik

Notizen: Abstract This paper determines the optimum range of total ion current for a cesium liquid metal ion source for use as a focused ion beam (FIB). This range is determined from a figure of merit calculated from measurements of the angular intensity and energy spread of emitted ions. Judging from both the figure of merit and the tail of the energy distribution curves, the total emission current should be set near 1 μA for a cesium FIB with a high current density. Assuming that both Cs- and Ga-FIBs have the same diameter, the relative current density of a Cs-FIB is expected to be approximately 80% that of a Ga-FIB.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF00323896

Permalink

Bibliothek	Standort	Signatur	Band/Heft/Jahr	Verfügbarkeit

Andere fanden auch interessant ...

Artikel (Nationallizenzen)

Volltext

Treffer 1 - 1 | 1 Treffer