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Optical emission diagnostics of laser-induced plasma for diamond-like film deposition (1991)

Chen, X. ; Mazumder, J. ; Purohit, A.

Springer

Applied physics 52 (1991), S. 328-334

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ISSN: 1432-0630

Keywords: 81.60 Z ; 81.15 Z ; 33 ; 52

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract Optical emission from a laser-induced plasma plume is recorded during KrF excimer laser ablation of graphite in a gas mixture of Ar and H2 (3%) for deposition of diamond-like thin films. At sub-GW/cm2 laser intensities the spectrum is dominated by the bands of C2 and CN. From the band intensities, the vibrational temperatures of both radicals are calculated to be 12–15×103 K, and their concentrations are estimated to be 5×1014 cm−3 and 2×1014 cm−3, respectively.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00324774

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