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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 22 (1980), S. 119-128 
    ISSN: 1432-0630
    Keywords: 42.30 ; 42.80 ; 72.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract This review paper is concerned with the imaging properties and major uses of scanning optical microscopes. It is shown that the confocal scanning microscope exhibits a form of super-resolution and that the instrument in general has great application in nonlinear microscopy and the inspection of electronic devices.
    Type of Medium: Electronic Resource
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