ISSN:
1432-0649
Schlagwort(e):
81.40.Tv
;
42.80.Lh
;
82.50.Jy
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Physik
Notizen:
Abstract Pulsed CO2 laser cleaning of black debris formed during the excimer laser ablation of polyimide in air is demonstrated. The 10.6 μm CO2 laser radiation is strongly absorbed in the debris but only weakly absorbed in polyimide thus enabling the clean removal of the debris without damaging the polyimide.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00692340
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