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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 46 (1988), S. 249-253 
    ISSN: 1432-0630
    Keywords: 68.55 ; 73.60 ; 77.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The low-temperature fabrication of silicon nitride films by ArF excimer laser irradiation has been studied. Two fabrication methods are presented. One is photo-enhanced direct nitridation of a silicon surface with NH3 for very thin gate insulators, and the other is photo-enhanced deposition of silicon nitride films with Si2H6 and NH3 gases for stable passivation films. The ArF excimer laser irradiation dissociates the NH3 gas producing NH and NH2 radicals which proved effective in instigating the nitridation reaction. The quality of both films has been much improved and the growth temperature has been lowered by using laser irradiation. These photo-enhanced processes seem to be promising ULSI techniques because they do not depend on high temperatures and are free from possible reactor contamination.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 46 (1988), S. 249-253 
    ISSN: 1432-0630
    Keywords: 68.55 ; 73.60 ; 77.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The low-temperature fabrication of silicon nitride films by ArF excimer laser irradiation has been studied. Two fabrication methods are presented. One is photoenhanced direct nitridation of a silicon surface with NH3 for very thin gate insulators, and the other is photo-enhanced deposition of silicon nitride films with Si2H6 and NH3 gases for stable passivation films. The ArF excimer laser irradiation dissociates the NH3 gas producing NH and NH2 radicals which proved effective in instigating the nitridation reaction. The quality of both films has been much improved and the growth temperature has been lowered by using laser irradiation. These photo-enhanced processes seem to be promising ULSI techniques because they do not depend on high temperatures and are free from possible reactor contamination.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 19 (1981), S. 2185-2194 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The polymerization of cyclohexene oxide was investigated with a new catalyst system of Al(acac)3- silanol compounds. Catalyst activity varied with the ratio of silanol/Al(acac)3 and the structure of silanol compounds. Catalyst deactivation appeared to be caused by self-condensation of silanol and the addition of silanol to the epoxy ring. Polymer structure was investigated by 13C-NMR spectroscopy and x-ray diffraction. The mechanism of the polymerization appears to be cationic.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 19 (1981), S. 2541-2550 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The polymerization of cyclohexene oxide with Al(acac)3-silanol catalyst supported by zeolite and porous silica has been investigated. Cyclohexene oxide was also polymerized to a lesser extent by a zeolite-silanol catalyst and an Al(acac)3-silica gel catalyst. The catalytic activity of the zeolite-silanol system varied with the zeolite pore size. The catalytic activity of the Al(acac)3-silanol system was enhanced by supporting the catalyst with porous silica or zeolite. The Al(acac)3-silanol catalyst supported by zeolite was especially effective in increasing polymer conversion and molecular weight. Catalytic activity increased with increasing chemical interaction between silanol and porous silica. The molecular weight of the polymers with these catalysts increased in the order zeolite-silanol〉 zeolite-Al(acac)3-silanol 〉Al(acac)3-silanol ≈ Al(acac)3-silanol supported by porous silica〉Al(acac)3-silica gel.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 20 (1982), S. 1433-1443 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: A new catalyst system (Ph3SiCOPh-aluminum complex-alcohol) was investigated for photopolymerization of cyclohexene oxide. Polymer conversion and molecular weight increased with polymerization time. When a Ph3SiCOPh-Al (n-Praa)3-alcohol catalyst system was used the catalyst activity decreased, depending on the alcohol: i-PrOH 〉 n-PrOH 〉 i-BuOH 〉 MeOH 〉 t-BuOH 〉 H2O. When the Ph3SiCOPh-Al complex-i-PrOH catalyst system was used the catalyst activity decreased, depending on the ligand of the Al complex: ß-ketoester 〉 orthocarbonyl phenol 〉 ß-diketone. Benzophenone derivatives were effective for catalyst activation as a photosensitizer.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 20 (1982), S. 1652-1652 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Additional Material: 1 Tab.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 19 (1981), S. 2977-2985 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: Polymerization of cyclohexene oxide, especially the catalytic activity influenced by silanol structure, was examined by using an Al(acac)3-silanol compound catalyst. The catalytic activity increased as the acidity of silanol increased. It was prolonged by sterically hindered silanol compounds which prevented the silanol from self-condensation and from joining with the epoxide. In addition, the greater catalytic activity produced by intramolecular hydrogen-bonding silanol compounds is explained by the polymer effect.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Physics Edition 17 (1979), S. 1237-1250 
    ISSN: 0098-1273
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Physics
    Notes: Correlations between the crystal structures of polymers consisting of the hydrogen-bonded molecular sheets and anisotropy of the linear compressibility (K0) of the crystal were studied at 20°C under hydrostatic pressures up to 6 kbar. For nylon-6, it was found that K0 is more than four times larger in the direction normal to the hydrogen-bonded sheet than in the parallel direction. The inversion of the sheet direction involved in the α → γ transition of nylon-6 was clearly reflected in the anisotropy of the linear compressibility. For atactic poly(vinyl alcohol), K0 in the c-axis direction was 1.6 times larger than that in the a-axis direction, which is consistent with a structure model with the hydrogen-bonded sheet parallel to the a-axis. Theoretical calculations by Tashiro et al. indicate, however, the anisotropy does not necessarily correspond to the sheet structure when the direction of the hydrogen bonds strongly deviates from the plane of the sheet.
    Additional Material: 15 Ill.
    Type of Medium: Electronic Resource
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