ISSN:
1432-0630
Schlagwort(e):
61.70Jc
;
72.20Fr
;
81.15EF
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Composition inhomogeneity in nearly matched epilayers of the ternary semiconductor alloy GaxIn1−xAs (x close to 0.47), grown by molecular beam epitaxy (MBE) on (001) InP substrates is correlated to variation of the lattice mismatch by x-ray imaging and local diffractometry. Misfit dislocations are shown to develop in areas of large misfit (above 2 × 10−3) and are at the origin of a severe degradation of the electron mobility: an increase by a factor of about 4 in the intrinsic misfit (2.3 × 10−3 compared to 0.6 × 10−3) results in a 35 % reduction of the 77 K electron mobility.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00626130
Permalink