ISSN:
1432-0630
Schlagwort(e):
42.60
;
74.70
;
73.60
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Thin films of YBa2Cu3O7 coated with a photoresist have been patterned by means of XeCl- and KrF-excimer-laser light projection. Lines with widths down to 3.5 μm have been fabricated without degradation in T c and j c. The technique is compared with wet-chemical etching and with ns and fs excimer-laser patterning of films without a protective layer.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00332439
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