ZIB

Hits per page

hit 1 - 1 | 1 hit

Sorting

Electronic Resource

Spatial resolution limitation in Auger microanalysis of compounds (1994)

Polonsky, Boris A. ; Protopopov, Oleg D.

Springer

Microchimica acta 114-115 (1994), S. 413-419

add to mindlist on the mindlist

Details

ISSN: 1436-5073

Keywords: Auger microanalysis ; spatial resolution ; contrast ; irradiation dose

Source: Springer Online Journal Archives 1860-2000

Topics: Chemistry and Pharmacology

Notes: Abstract The width of the resolved gap between the features of Auger images was calculated by Rayleigh criterion. When the threshold contrast is provided, this width is almost independent of the examined specimen nature and is defined only by probing electron beam diameter. The relation between the irradiation dose, contrast and spatial resolution is deduced. The flexible dependence allowing to evaluate both the real and maximum attainable spatial resolution of Auger images is obtained.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF01244568

Permalink

Library	Location	Call Number	Volume/Issue/Year	Availability

Others were also interested in ...

Paper (German National Licenses)

Fulltext

hit 1 - 1 | 1 hit