ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The accuracy by which an unknown concentration profile can be found by analysis of XPS spectra is investigated theoretically by analytical and numerical techniques. The problem of determining the profile is reformulated as an optimization problem. By use of analytical techniques we obtain qualitative statements about the depth resolution and we derive fundamental relationships between the different parameters that indicate their relative importance. In order to illustrate the various dependencies of the variability of the model parameters, we derive analytical expressions for the standard errors of the model parameters for two simple models: a dalta layer and an exponentially decreasing profile. Furthermore, the complete probability distribution of the model parameters for a rectangular model is investigated numerically.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740231104
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