Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
10 (1990), S. 73-89
ISSN:
0167-9317
Keywords:
Diffraction
;
lithography
;
modelling
;
process control
;
proximity printing
;
resolution
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(90)90001-A
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