ISSN:
0167-9317
Keywords:
Liquid phase (wet) silylation
;
Nuclear magnetic resonance spectroscopy (NMR)
;
Reactive ion etching (RIE)
;
Rutherford backscattering spectroscopy (RBS)
;
Scanning electron microscopy (SEM)
;
Submicron process
;
Surface imaging
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(94)90005-1
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