Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
20 (1993), S. 171-183
ISSN:
0167-9317
Keywords:
Explosive evaporation
;
Laser cleaning
;
Laser-induced particle removal
;
Microcontamination
;
Microdevices
;
Particulate contamination
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(93)90214-P
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