ISSN:
1573-4862
Keywords:
Ultrasonics
;
acoustic waves
;
scattering
;
diffraction
;
defect characterization
;
silicon nitride
;
NDE
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Mathematics
Notes:
Abstract The scattering of acoustic waves by different types of spherical defects in a silicon nitride matrix is calculated by using Ying and Truell's scattering theory. The theoretical scattering results are interpreted using a ray tracing approach. Experiments were carried out at a high frequency (150–450 MHz) to characterize defects in silicon nitride. Time and space averaging, Wiener filtering, diffraction, and propagation loss corrections were used to remove the effect of the transducer response and propagation loss in the material from the scattered signal. Our experimental results indicate the presence of a new type of defect in silicon nitride. They give the type and size of voids, cracks, and Si inclusions in good agreement with measurements obtained after sectioning.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00571805
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