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Wet-etching fabrication of multilayer GaAlAs/GaAs microtips for scanning near-field optical microscopy (2000)

Khalfallah, S. ; Gorecki, C. ; Podlecki, J. ; [et al.]

Springer

Applied physics 71 (2000), S. 223-225

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ISSN: 1432-0630

Keywords: PACS: 07.10.Cm; 73.61.Ey; 61.16.Ch; 42.55.Px

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract. We propose to fabricate GaAlAs/GaAs multilayer microtips for scanning near-field optical microscopy (SNOM) using anisotropic etching. The etching was performed in a solution of H3PO4:H2O2:H2O operating at a temperature of 10 °C. We obtained pyramid-shaped microtips with four etched facets and with a radius of curvature at the apex that was lower than 50 nm.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/s003390050058

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