ISSN:
1057-9257
Schlagwort(e):
Thin films
;
Laser ablation
;
X-ray mirrors
;
Plasma sources
;
UHV deposition equipment
;
Ni/C multilayer structures
;
SNMS depth profiling
;
TEM cross-section
;
Chemistry
;
Polymer and Materials Science
Quelle:
Wiley InterScience Backfile Collection 1832-2000
Thema:
Elektrotechnik, Elektronik, Nachrichtentechnik
,
Physik
Notizen:
The conventional thin film deposition equipment of LPVD has been modified for the preparation of nanometre-layer stacks of uniform thickness at reduced target/substrate separation. Therefore the planar target was replaced by a cylindrical one and the target motion regime has been modified.During thin film deposition a substrate translation is preferred instead of the usual rotation technique. With this arrangement the emission characteristic of the plasma source can be computer controlled and tailored via a stepper-motor-driven manipulator for the desired layer thickness profile across an extended substrate. Thus, for example, a homogeneous film thickness is obtained even for lower target/substrate distances, and an appropriate deposition rate can be maintained.First applications of the equipment are explained and compared with typical results of the conventional technique.
Zusätzliches Material:
11 Ill.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1002/amo.860020104
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