ISSN:
1432-0630
Schlagwort(e):
PACS: 81.15Fg; 81.40Cd; 68.35.Bs
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract. The influence of substrate temperature on the composition and crystallinity of boron carbonitride (BCN) thin films deposited on (100) Si substrates by sequential pulsed laser deposition (PLD) has been investigated. A correlation between the target composition, the nitrogen pressure involved in the process, and the amount of B, C, and N elements (at % ) in the deposited films is established from energy dispersive spectroscopy (EDS) analysis. Electron microscopy studies show that the films deposited on heated substrates are mainly amorphous. Fourier-transform infrared spectroscopy (FTIR) analysis confirms the BCN-compound formation: the peak of C–BN and the peaks from B–N–B bending vibrations and C–N σ-bond vibrations are present in the spectra. SEM studies show that the deposited films have a smooth surface, with no cracks and few droplets. Results were compared with those obtained on films deposited at room temperature under similar experimental conditions.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/s003390051501
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