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  • 1
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 19 (1992), S. 55-59 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: In an NiFe/Ta system, interface widths (Δz) are compared for sputter profiles with stationary and rotating sample holder (Zalar rotation). For low sputter angles, the Zalar rotation brings considerable improvements in Δz. For higher sputter angles, the improvement available through Zalar rotation vanishes as self-shadowing due to crystallites with less favorable orientation becomes the dominating rate mechanism. The improvement is further reduced for thinner films much below 1000 Å. For low sputter energies and films 125 Å thick, Zalar rotation has no influence. The limit of depth resolution was 30 Å, which resulted from the substrate-induced roughness of the NiFe/Ta interface. The interface width's maximum near 30° for stationary sputter etching is characteristic of sputter-deposited fcc films.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 20 (1993), S. 1051-1054 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The dependence of depth resolution Δz/z on the sputtering angle θ is investigated for three sputter-deposited films: Cr (bee), SiNx (amorphous) and FeCoTb (amorphous). The depth resolution for the Cr system exhibits two maxima at θ = 35° and 45°. These are characteristic for bee textured material but different from fee textured material. The amorphous films show a very weak dependence, if any, owing to the absence of crystallites and crystalline texture. These results are in accordance with channeling theory.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Materialwissenschaft und Werkstofftechnik 27 (1996), S. 345-349 
    ISSN: 0933-5137
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Description / Table of Contents: Ultrafeine ZrO2 - Pulver durch Laserverdampfung: Herstellung und EigenschaftenUltrafeine oxidische Pulver werden durch Co2-Laserverdampfung aus grobem ZrO2-Pulver oder kompakten ZrO2-Stangen hergestellt.Die 10.6 μm-Strahlung im Leistungsbereich von 1 bis 4 kW wird durch einen quergeströmten CO2-Laser erzeugt, der in cw-und Pw-Betrieb arbeitet.Die Verdampfungsrate ist abhängig von der relativen Lage der Fokalebene zur Oberfläche des ZrO2-Pulvers, der Laserintensität und der eingekoppelten Energie.Bei einer Laserintensität von 4.2 · 105 Wcm-2 erreicht man eine optimale Verdampfungsrate von 130 g · h-1 (cw-Betrieb des Lasers).Das hergestellte Pulver besteht aus sphärischen Partikeln; deren Durchmesser variiert im Bereich von 5 bis 200 nm und kann durch die Verfahrensparameter beeinflußt werden. Die spezifische Oberfläche ist einstellbar von 10 bis 30 m2 · g-1.Das Pulver aus unstabilisiertem Zirkonium besitzt einen sehr hohen Anteil tetragonaler Phase. Im Fall von chemisch stabilisiertem Zirkonium kann sich die Zusammensetzung während des Verdampfungsprozesses und der Rekondensation ändern.
    Notes: Ultrafine oxide powders were produced by CO2 laser evaporation of coarse ZrO2 powder or compact stabilized ZrO2 materialThe 10.6μm radiation in the power range 1-4kW was generated by a transversal flow Co2 laser which can oscillate in cw and pw operationThe vaporization rate depends on the relative position of the focal plane to the surface of the ZrO2 powder, the laser intensity and the supplied energy input.At a laser intensity of 4.2 · 105 Wcm-2 the optimum vaporization rate is 130 g · h-1 (cw-operation of the laser).The produced powders consist of spherical particles; their diameters vary in the range from 5 to 200 nm can be controlled by the process conditions. The surface area (BET) is adjustable from 10 to 30 m2 · g-1.The powders of unstabilized zirconia show an unusual high content of the tetragonal phase. In case of chemically stabilized zirconia the composition can change during the process of evaporation and recondensation.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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