ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The deposition of CeO2 on Si(111) has been studied by low energy electron diffraction (LEED), Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). LEED shows the CeO2 layer to grow in the (111) orientation. The formation of a silicon oxide layer at the interface is observed. The thickness of this oxide layer is found to vary between about 1 and 8 nm, depending on the thickness of the CeO2 layer. A model for the growth of CeO2 and for the formation of the silicon oxide layer at the interface is proposed.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740220141
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