ISSN:
0142-2421
Schlagwort(e):
molybdenum oxides
;
oxygen plasma
;
ballistic effects
;
XPS
;
Chemistry
;
Polymer and Materials Science
Quelle:
Wiley InterScience Backfile Collection 1832-2000
Thema:
Physik
Notizen:
The oxidation of molybdenum at room temperature with oxygen plasma or a beam of O2+ ions has been studied with Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS). Auger electron spectroscopy shows a progressive modification of the N2,3VV lineshape and the development of new features close to the intense M4,5NN Auger transitions of metallic Mo at 160, 186 and 221 eV. The effects are greater with the oxygen plasma than with the O2+ bombardment. X-ray photoelectron spectroscopy shows that the incorporation of oxygen into the molybdenum gives rise to the formation of Mo6+, Mo4+ and a form of Mon+ (n〈4). The (Mo4++Mon+)/Mo6+ ratio was higher after O2+ ion bombardment than by treatment with the oxygen plasma, in which case the concentration of the Mo4+ and Mo6+ oxidation states was very similar. The analysis of the O 1s and O KLL Auger spectra under the different conditions showed that whenever a high concentration of the Mo6+ species is present, the O-Mo bond is more covalent in character. To evaluate the influence of chemical and ballistic effects in the two oxidation processes, additional experiments were carried out with MoO3. This oxide was bombarded with Ar+ and O2+ until a steady-state surface composition was reached. In both cases, the formation of a considerable amount of Mo4++Mon+ (n〈4) and Mo0 species (i.e. reduction of Mo6+ initially present in the sample) was detected. These results suggest that the high concentration of Mo4++Mon+ found upon bombardment of Mo0 with O2+ is rather produced by ballistic effects, which cause the reduction of the initially formed Mo6+. © 1998 John Wiley & Sons, Ltd.
Zusätzliches Material:
7 Ill.
Materialart:
Digitale Medien
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