ISSN:
1572-9605
Keywords:
Powder target
;
magnetron sputtering
;
high-temperature superconducting thin films
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract We have used stoichiometric Y1Ba2Cu3O7−x powder as magnetron sputtering target to deposit high-quality high-T c superconducting thin films on MgO, SrTiO3, and ZrO2 substrates. The zero-resistance temperatures are 86–88 K, and the 77 K zero-field critical current density is 8 × 105 A/cm2. The films are highlyc-axis oriented. Films deposited on 10 × 10 × 1 mm3 ZrO2 substrates have surface resistances below 25 mΩ at 77 K and 94 GHz. Using powder targets instead of bulk targets has the following advantages: simple and low-cost target preparation, simple target replacement, and versatility for large-area deposition.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00617623
Permalink
