ISSN:
1572-8986
Schlagwort(e):
RF plasmas
;
microwave plasmas
;
frequency effects
;
fluorocarbon
;
hydrocarbon
;
plasma polymer
;
surface wave
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Chemie und Pharmazie
,
Maschinenbau
,
Technik allgemein
Notizen:
Abstract A plasma sustained by surface waves (SW) has been used to study the deposition rate R of hydrocarbon and fluorocarbon plasma polymer films as a function of excitation frequency f=ω/2π in the range 12–400 MHz. The SW technique allows one to vary only f while keeping constant all other parameters known to influence R, for example, power density in the plasma P. A plot of R/P at a total pressure of 200 m Torr (27 Pa) displays two plateaus, that at f〈30 MHz being about five times lower than that at f≥100 MHz. This is attributed to the fact that electron energy distribution functions differ fundamentally at radio- (f≤50 MHz) and “microwave” (f≥100 MHz) frequencies, for the gas pressure range considered.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF01030489
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