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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Optical review 4 (1997), S. 584-587 
    ISSN: 1349-9432
    Keywords: shape memory alloy ; Ni-Ti ; two way shape memory effect ; alignment ; pinhole ; photodetector ; feedback control
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract Properties of the shape memory alloy of 29 μm thick Ni-Ti foil are investigated as an actuator to align optical elements. Since the intrinsic properties of the Ni-Ti foil are not satisfactory in reproducibility and hysteresis, a simple feedback control is used. A pinhole integrated with a surrounding position sensor is proposed to realize a confocal optical system having an automatic alignment function. Large displacement (mm) and precision at the level of the optical wavelength are found to be possible.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1349-9432
    Keywords: Si micromachining ; pinhole ; photodiode ; shape memory alloy ; spatial filter ; automatic alignment
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. The position signal obtained from a two or four cell type photodiode and position sensitive detector show the sensitivity even when the beam spot is near the center pinhole. Combined with the feedback control of the shape memory alloy actuator based on the obtained position signal, the pinhole is aligned automatically.
    Type of Medium: Electronic Resource
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