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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Journal of nanoparticle research 1 (1999), S. 43-49 
    ISSN: 1572-896X
    Keywords: titanium oxide ; tantalum oxide ; dielectric ; thin film ; sol–gel ; microcontact printing
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics , Technology
    Notes: Abstract TiO2, Ta2O5, and mixed TiO2/Ta2O5 ultrathin films were grown layer-by-layer using a surface sol–gel deposition technique. The technique allows one to prepare smooth films of mixed composition with ångstrom-level control of thickness. The thickness increases per adsorption/hydrolysis cycle were 4.5, 2.1, and 2.5 Å, respectively, for TiO2, Ta2O5, and mixed TiO2/Ta2O5 (1.6sol;1) films. By combining X-ray diffraction and ellipsometric analysis, it was determined that the as-deposited TiO2 films are less dense than bulk TiO2, and do not adhere persistently to Si/SiO2 or Au/2-mercaptoethanol substrates. These ‘green’ films were annealed at 400°C to produce denser and highly adherent films. Patterning the surface by microcontact printing of siloxane polymer thin films allows one to prepare patterned sol–gel oxide thin films.
    Type of Medium: Electronic Resource
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