ISSN:
1573-4846
Keywords:
chemical modification
;
photosensitivity
;
ZrO2 films
;
diffraction gratings
;
two-beam interference
;
method
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract Diffraction gratings of arbitrary periods have been fabricated by the two-beam interference method using photosensitive ZrO2 gel films and characterized. The ZrO2 gel films were formed on Si or silica glass substrates from sols that were derived from Zr-butoxide modified chemically with benzoylacetone. The gel films were irradiated with two interference beams from a He-Cd laser (325 nm) and then leached in ethyl alcohol. The above process gave uniform surface-relief gratings of periods ranging from 1.0 to 0.5 μm, depending on the incidence angle of the interference beams. The diffraction efficiency, measured in the Littrow configuration using a He-Ne laser (633 nm), showed polarization dependence for the grating of 0.5 μm period but not for the gratings of 1.0 μm period. The maximum diffraction efficiency was 18% for the grating of 1.0 μm period and 28% for that of 0.5 μm period in the reflection mode. The present study has proved that the photosensitive gel films are versatile in fabrication of optical devices.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1008786827194
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