ISSN:
0268-2605
Keywords:
MOCVD
;
barium
;
liquid delivery
;
mixed-metal species
;
aerosol-assisted CVD
;
Chemistry
;
Industrial Chemistry and Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Conventional MOCVD techniques require molecules displaying volatility and constant vapor pressure. Metal oxide precursors, i.e., β-diketonates, or classical or functionalized metal alkoxides are mostly solids. The various approaches used to tailor volatility are discussed with barium derivatives as an example. The relationships between sublimation temperature and molecular weight suggest that volatility can be optimized on the basis of molecular weight. Aerosol-assisted CVD (AACVD) can use a larger range of precursors since volatility is no longer crucial. The solvent is an undesired ballast in a CVD process. High solubility of the precursors in the selected solvent is thus desirable. ‘Stability’ here includes the absence of precipitation which would change the stoichiometry of the feed solution for multicomponent oxides. Precipitation is often promoted by hydrolysis; stability toward moisture is thus desirable. The use of mixtures of precursors based on different ligands (β-diketonates, β-ketoesterates, alkoxides) can lead to ligand exchange reactions giving homometallic species, sometimes of low solubility, or mixed-metal species by self-assembly, thus improving solubility and stability toward moisture. These aspects are illustrated in compositions related to high-Tc superconductors. Novel copper, yttrium, cerum(IV), barium-copper, yttrium-copper and praseodynium-copper species are reported. © 1998 John Wiley & Sons, Ltd.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
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