Digitale Medien
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 121-123 (Mar. 2007), p. 1143-1148
ISSN:
1662-9779
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Physik
Notizen:
Particle’s behavior in the slurry with power-law viscosity shows great effect on the wafersurface polishing. Hydrodynamic pressure is periodically generated on the surface asperity whenparticles are passing through it. Fatigue fracture occurs under the effect of periodical pressure and itbegins from the top to the bottom of the asperity. Based on the energy-balance fracture theory, theremoval rate is calculated and it shows good agreement with experiment data
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.1143.pdf
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