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Digitale Medien

Laser cleaning: Laser-induced removal of particles from surfaces (1993)

Zapka, W. ; Ziemlich, W. ; Leung, W. P. ; [weitere]

New York, NY [u.a.] : Wiley-Blackwell

Advanced Materials for Optics and Electronics 2 (1993), S. 63-70

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Details

ISSN: 1057-9257

Schlagwort(e): Particulate ; Contamination ; Laser-induced removal ; Particle removal ; Laser cleaning ; Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Elektrotechnik, Elektronik, Nachrichtentechnik , Physik

Notizen: Pulsed-laser-induced removal of particles from surfaces is a new cleaning technique. This laser cleaning can be performed on dry surfaces as well as on wet surfaces with a micron-thick liquid film during pulsed laser irradiation to provide enhanced removal efficiency. Using the latter technique, to be called ‘steam laser cleaning’ here, we are able to remove epoxy, alumina, silicon or gold particles with diameters in the range 0.1-10 μm from silicon and other surfaces.

Zusätzliches Material: 6 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/amo.860020108

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