ISSN:
1572-896X
Schlagwort(e):
titanium oxide
;
tantalum oxide
;
dielectric
;
thin film
;
sol–gel
;
microcontact printing
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Physik
,
Technik allgemein
Notizen:
Abstract TiO2, Ta2O5, and mixed TiO2/Ta2O5 ultrathin films were grown layer-by-layer using a surface sol–gel deposition technique. The technique allows one to prepare smooth films of mixed composition with ångstrom-level control of thickness. The thickness increases per adsorption/hydrolysis cycle were 4.5, 2.1, and 2.5 Å, respectively, for TiO2, Ta2O5, and mixed TiO2/Ta2O5 (1.6sol;1) films. By combining X-ray diffraction and ellipsometric analysis, it was determined that the as-deposited TiO2 films are less dense than bulk TiO2, and do not adhere persistently to Si/SiO2 or Au/2-mercaptoethanol substrates. These ‘green’ films were annealed at 400°C to produce denser and highly adherent films. Patterning the surface by microcontact printing of siloxane polymer thin films allows one to prepare patterned sol–gel oxide thin films.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1023/A:1010061612772
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